Abstract:Based on the electrostatic field and the theory of elastic thin plate, electrostatically actuated circular membrane theoretical model is built, which is established in the clamped boundary conditions． At the same time, the two kinds of situation are compared to obtain the displacement analysis in different voltage． Through the calculation example the structure vibration type, resonant frequency and limit load voltage are obtained． Using Ansys software for electrostatic drive structure vibration modal analysis, the vibration modal shapes and its frequency are obtained．