压电驱动膜片的弯曲振动仿真

付赫林; 李丽伟

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DOI:10.3969/j.issn.1006-4729.2015.06.014

Journal of ShangHai University of Electric Power :2015,31(6):565-567,580

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压电驱动膜片的弯曲振动仿真

付赫林, 李丽伟

(上海电力学院能源与机械工程学院)

Simulation of the Bending Vibration of Piezoelectric Actuator

FU Helin, LI Liwei

(School of Energy and Mechanical Engineering, Shanghai University of Electric Power, Shanghai 200090, China)

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Received:March 23, 2015

中文摘要: 基于压电本构方程,建立了压电弹性复合驱动膜的机电耦合模型,利用ANSYS软件对压电复合膜进行了静态及一阶模态分析,对比分析了空心与实心PZT复合膜片的驱动能力,分别讨论了复合膜厚度、压电膜与弹性膜直径比等结构参数对膜片振动挠度的影响,获得了压电层与弹性层最佳粘贴比.

中文关键词: 微机电系统压电驱动弯曲振动机电耦合

Abstract:Based on the piezoelectric constitutive equation, the finite element model of coupled-field of PZT-Si₃N₄ film is established. Static analysis and first order modal simulation on the PZT-Si₃N₄ film are accomplished by using ANSYS software. The actuation capability of ring film is compared with that of circular film. The influences of structural parameters of actuation film such as thickness and diametrical ratio on actuatting deflection are analyzed separatedly. The optimum bonding ratio of PZT/Si₃N₄ is obtained.

keywords: Micro-Electro-Mednanical System (MEMS) piezoelectric actuation bending vibration electromechanical coupling

文章编号：20150614 中图分类号： 文献标志码：

基金项目:

Author Name	Affiliation	E-mail
FU Helin	School of Energy and Mechanical Engineering, Shanghai University of Electric Power, Shanghai 200090, China	772994497@qq.com
LI Liwei	School of Energy and Mechanical Engineering, Shanghai University of Electric Power, Shanghai 200090, China

Author Name	Affiliation	E-mail
FU Helin	School of Energy and Mechanical Engineering, Shanghai University of Electric Power, Shanghai 200090, China	772994497@qq.com
LI Liwei	School of Energy and Mechanical Engineering, Shanghai University of Electric Power, Shanghai 200090, China

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